Professor
Ontario Research Chair
Associate Chair, Graduate Studies

Education:: BE[Hons] (Madurai); MEng(AIT, Bangkok); PhD (Univ. of Paris, Paris)

Areas of Interest:

Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology
Advanced processing technologies for microelectronic devices and process modeling
MEMS technology, silicon micromachining
Nanocrystalline semiconductors and nanostructures
Low-permittivity dielectric films and device integration
Low-thermal budget, rapid thermal, and optothermal processing in silicon technology

Phone: +1 519 888 4567 extension 35319

Fax: +1 519 746 3077

Office: ERC 1001

Email: sivoththaman@uwaterloo.ca

Siva Sivoththaman