Dimension 3100 Scanning Probe Microscope
The Dimension 3100 Scanning Probe Microscope (SPM) utilizes automated atomic force microscopy (AFM) techniques to measure surface characteristics for semiconductor wafers, lithography masks, magnetic media, CDs/DVDs, biomaterials, optics, and other samples up to 200 mm in diameter.
Its laser spot alignment system and the ability to change scanning techniques without tools guarantee flexibility, ease of use, and high product throughput.
The machine is capable of detecting profiles up to 6 micro-meter in the z-range and 90 by 90 square micrometer in the x-y imaging area. The 3100 comes with a vibration isolation table to ensure the best accuracy possible.
Some features of the Dimension 3100 AFM:
- Contact Mode
- Tapping Mode
- 1% lateral accuracy (2% max.)
- full 16-bit resolution on all axes for all scan sizes and offsets
- enhanced motorized positioning
- 150 mm vacuum chuck for hard disks, semiconductor wafers, and other samples
- motorized zoom and focus
- computer-controlled illumination
- video image capture
- Acoustic enclosure
Find out the hourly rate we charge for using the Dimension 3100 Scanning Probe Microscope.