ATC ORION Series Sputtering tool is a multi-target sputtering system designed for combinatorial experimental research.

Up to 5 two-inch sputter targets can be installed and run using dc-magnetron or rf sputtering of metals, semiconductors and dialectrics. The sputter system is capable of substrate heating up to 1000^oC and has a base pressure of 5x10^-7 Torr.

The system is specifically designed for deposition of Transition Metal Oxides for transparent flexible electronics applications.

Users can use a variety of baseline sputter targets and may supply their own special target material after consultation with the G2N technical lab manager.

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