Angstrom Engineering Evovac Vacuum Deposition System
The Evovac is a glove box-integrated single chamber vacuum deposition system equipped with 10 resistive thermal evaporation sources (4 source co-deposition capability), a 7cc electron beam source and a Gridless Ion Beam Source for O2 and Ar ion beam assist (100-300 kev).
The system is used for fabrication of organic electronic devices.