Andrei Sazonov

Associate Professor

Electrical and Computer Engineering Department

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ECE 639

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Patents:
  • Patent of Russian Federation from 30.03.1995. Priority from 04.02.1993. A.A. Aivazov, B.G. Budagyan, A.Yu. Sazonov, and E.L. Prikhod’ko, “The method for deposition of amorphous hydrogenated silicon thin films,” application #93 006889/25/005763 (in Russian). Electronic-grade amorphous hydrogenated silicon thin films with enhanced stability are deposited by addition of 5 to 8 atomic percent of nitrogen.