Instructor: C ( Selva) R. Selvakumar Office: DC 3716 Phone: x3978
e-mail: selvakumar@uwaterloo.ca
Web: http://valluvar.uwaterloo.ca/~selvakum/E631.html
This course will offer an introduction to the principles and practices
of fabrication of integrated circuits. Major emphasis will be on
silicon technology although several aspects of GaAs and other
compound semiconductor technologies will also be dea
lt with. A list of topics which will be covered in this course is :
1. Overview of Semiconductor IC Process technologies
2. Crystal growth ( Czochralski, Float Zone, polishing, gettering, challenges)
3. Oxidation ( kinetics, Deal-Grove model, rate constants,
high pressure oxidation, dopant effects, two & three dimensional effects, defects)
4. Deposition techniques ( vaccum evaporation, sputtering, CVD, LPCVD)
5. Epitaxy ( including MBE, MOCVD, CBE, UHV-CVD)
6. Diffusion ( Fick's model, concentration dependent models, field effect,
band-gap narrowing effect, anomalous effects )
7. Ion Implantation ( Ion stoping, range distributions, damage, annealing,
high energy implants)
8. Rapid thermal annealing.
9. Lithography ( optical, e-beam and x-ray; resists )
10. Etching ( wet chemical, dry reactive ion-etching, anisotropic etches,
defect delineation)
11. Interconnect technology
12. Yield and Safety issues and evolving strategies ( cluster tool, microfactory etc.)
References:
1. S. K. Ghandhi, VLSI fabrication Principles, 2nd Edition John Wiley 1994
2. S.M. Sze , VLSI Technology, McGraw-Hill 1988
3. W.R.Runyan and K.E. Bean, Semiconductor Integrated Circuit Processing Technology
Addison-Wesley 1990 ( Text-book)
4. Recent journal articles and review articles.
Lecture Hours and Hall: Thursdays 2:30-5:30 beginning Sept 14, 1995 at DC 2542
Registration: Please send an e-mail to selvakumar@uwaterloo.ca indicating the
department in which you pursue your Graduate Program,
the name of your thesis advisor and the names of courses you
have taken earlier in the area of semiconductor
devices and technology either in Undergraduate or in
Graduate program.
