Ion Beam Assisted Deposition Research ( Selvakumar)
[Under construction]
Specific topics:
- Study of Low Energy Ion Bomabardment during films growth ( Si and SiGe).
- Ion Vapor Deposition ( Si and SiGe)
Contact:
C. R. (Selva) Selvakumar
E&CE Department
University of Waterloo
Waterloo, Ontario
Canada N2L 3G1
email: selvakumar@uwaterloo.ca
voice: (519) 888-4567 ext.3978
fax: (519) 746-3077
last modified: June 11, 1995