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Slides in PowerPoint, NOT Zip file. Try save file first, then open with PowerPoint version 2007

  1. Nanofab_overview
  2. Etching_overview
  3. Deposition_overview
  4. Resolution enhancement
  5. Other photon-lithographies
  6. Extreme UV lithography
  7. X-ray lithography_1
  8. X-ray lithography_2
  9. Electron beam lithography_1
  10. Electron beam lithography_2
  11. Focused ion beam_1
  12. Focused ion beam_2
  13. Focused ion beam_3
  14. Focused ion beam_4
  15. Nanoimprint lithography_1
  16. Nanoimprint lithography_2
  17. Nanoimprint lithography_3
  18. Nanoimprint lithography_4
  19. SPM and lithography_1
  20. SPM and lithography_2
  21. SPM and lithography_3
  22. Soft lithography
  23. Self assembly_1
  24. Self assembly_2